Equipment size: 2900mm (L) * 1800mm (W) * 1900mm (H)

Equipment function: Cross FOUP/Cassette sorting/transfer; OCR code reading+alignment; Vacuum environment handling; MES/ECS/GEM traceability; Can connect AGV/AMR/OHCV/OHT online

Sorting efficiency: ≥ 300WPH (with OCR)

Positioning accuracy: XY ± 0.1mm, T direction ± 0.01 °

Repeat positioning: ± 0.1mm

Transport vibration: ＜ 0.5 G

Cleanliness level: Class 1

Technical Features:

2-10 optional Loadport layouts, supporting software and mechanical structure customization

    • Compatible with 4/6/8/12 inch wafers; Support SEMI standard FOUP/Cassette/SMIF;

Customization of special processes such as high temperature resistance/corrosion resistance for remote monitoring and control

MES/ECS/GEM protocol docking, full process data upload and traceability

Fully enclosed chamber+FFU purification, meeting Class 1 cleanliness requirements, suitable for dust-free workshops

    • Compatible with non silicon based (SiC/GaN) wafer recognition