Equipment function: Used for storage of various vehicles such as FOUP/SMIF Pod, adopting a continuous structure design, improving durability and storage density, providing intelligent storage management, reducing outbound time, and improving transmission efficiency. Customize Stocker size based on Layout layout to maximize Fab space utilization. Simultaneously supporting material transfer and storage across floors.

Load weight: 15kg

Walking speed: 2 m/s

Lifting accuracy: 1.5 m/s

Handling efficiency: 180 pcs/H

Transport vibration:<0.5 G

Cleanliness level: Class 100

Capture type: FOUP/SMIF Pod/Metal cassette/Magazine

Technical Features:

    • Can automatically connect with OHCV/OHT, RFID identification and inventory management

    • Remote monitoring and control

    • Safety protection

    • Modularity and Scalability