Equipment size: 600mm (L) * 300mm (W) * 200mm (H) (customizable)

Equipment function: The load port end of the device is equipped with an E84 Controller to determine the status of the load port, and through the E84 Sensor, it interacts with the handling equipment AGV to ensure the safety of loading and unloading goods. Suitable for the modification of wafer chamfering machines, stock entrances and exits, etc.

Cleanliness level: Class 100

Communication compatibility: SECS/GEM, TCP/IP

Technical Features:

    • Coordinate with handling equipment such as OHT and AGV

    • Vehicles for loading silicon wafers (SMIF POD, FOUP, etc.)

Automatically and safely placed on the load port of the device without manual intervention

Upload data to MCS system to achieve full process traceability and remote operation and maintenance of packaging