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  • Semiconductor

    Automatic defect detection equipment for ship type vehicles

    Automatic ejector pin module detection

    Final appearance inspection of the chip

    Chip heat dissipation cover flux detection

    Automatic detection of adhesive for heat dissipation cover

    Inverted chip filling adhesive detection

    Chip inversion position detection

    Automatic six-sided chip inspection

    Fully Automated Wafer Optical Inspection Equipment

    Automatic Wafer Sorter

  • AMHS

    OPE equipment

    Cleaning machine loading and unloading modification equipment

    E-rack equipment

    E84 equipment renovation

    Intelligent storage system

    Tray packaging machine

    Wafer packaging machine

    Automatic wafer sorting machine

    Autonomous Mobile Robot AMR

    High altitude wafer conveyor line

Cleaning machine loading and unloading modification equipment

Equipment size: 1800mm (L) * 450mm (W) * 2200mm (H)

Equipment function: AGV automatically loads and unloads materials to E-rack for storage, transfers full materials and empty OC

Docking equipment: AGV and cleaning machine

Type of material box: 12 inch OC material box

Cleanliness level: Class 100

Communication compatibility: SECS/GEM, TCP/IP

Technical Features:

    • Replace manual loading and unloading of materials

    • Automatic QR code scanning data upload traceability and remote operation and maintenance

E-rack temporary storage

One side is loaded with full material, while the other side is unloaded with empty OC

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