Equipment function:

    • Transportation of products from wafer fabs

Automated handling of wafer boxes (such as open cassette), trays, components, etc

Utilize the space above the factory to set up and optimize the space

Seamless integration into MES, MCS, RDT and other systems to automatically schedule and track material flow

The system can be expanded as needed, with adjustable track length and control points

Vibration value: ≤ 0.5g

CV operating speed: 150-450 mm | s

Horizontal perpendicularity between two CV segments: ± 0.05mm

Technical Features:

    • Equipped with CV caching function

    • Support CAD import and hand drawn maps

    • Automatic elimination of congestion and abnormal material box reflux function

    • Large screen display function, dynamically and real-time display of device status, material box status, and task execution status

    • Can seamlessly integrate with Stocker, Lifter, Inverted Blue, AGV to achieve intelligent air logistics handling system

Applicable products: 4-inch, 6-inch, 8-inch wafers