Equipment size: 1200mm (L) * 720mm (W) * 1145mm (H) (with load cooperative manipulator, arm span 1300mm)

Equipment Function: AMR (Autonomous Mobile Robot) is a core equipment that adapts to Class 1-5 clean environments and achieves flexible handling of silicon wafer FOUP/Cassette and other materials between production lines through autonomous navigation and dynamic scheduling

Load weight: 15kg

Walking speed: maximum straight line speed of 0.6M/s, acceleration and deceleration of 0.3m/s2 Max storage vibration<0.5G

Lifting accuracy: ± 0.3mm

Cleanliness level: Class 10

Capture type: FOUP/SMIF Pod/Metal cassette/Magazine

Communication protocols: SECS/GEM, E84

Continuous working hours: ≥ 8H

Technical Features:

    • Implement point-to-point automatic transfer of FOUP/Cassette between machines, STK cache areas, and edge stations, supporting free scheduling of multiple stations

Trackless operation, no need for ground modification; Equipped with LiDAR and visual sensors to achieve dynamic obstacle avoidance and ensure the safety of personnel and equipment

Seamless integration with machine load ports and STK shelves, achieving automatic material loading and unloading with a success rate of ≥ 99.9%

    • Support multi machine collaborative management, connect to factory MES/WCS systems, support dynamic task allocation, path optimization, and load balancing

    • Equipped with real-time status monitoring, fault self diagnosis, sound and light alarm functions, supporting remote operation and maintenance