Performance

• Profile measurement <0.03mm

• Straightness <0.025mm

• Vertical measurement <0.02mm

• Position measurement <0.015mm

• Thickness measurement <0.02mm

• 3D glue height <0.03mm

• Surface profile measurement <0.08mm

• GRR<10%, Correlation < 20%

• 3xpoint laser + 1xline laser +2xCCD system

• Machine-tool installation meter making process

• Online data collection and report making